Nanofabrication: principles, capabilities and limits
Auteur :
Cui, Zheng
Éditeur :
Springer International Publishing AG
ISBN :
9783031625480
Date de publication :
16 juil. 2025
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition.