Ion implantation and annealing applications, science and technology: contributions from iit school, edition 2026
Éditeur :
Springer Nature Switzerland AG
ISBN :
9783032311726
Date de publication :
4 sept. 2026
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This book is a new, comprehensive, tutorial-style reference from the IIT2026 school that unifies ion implantation and annealing, guiding the reader from historical context and fundamental beam physics through to full process integration in advanced semiconductor manufacturing.