Physical design and mask synthesis for directed self-assembly lithography
Auteur :
Shim, Seongbo / Shin, Youngsoo
Éditeur :
Springer International Publishing AG
ISBN :
9783319762937
Date de publication :
3 avr. 2018
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.