Planar waveguide optical sensors: from theory to applications
Auteur :
Dutta, Aradhana / Deka, Bidyut / Pratim Sahu, Partha
Éditeur :
Springer International Publishing AG
ISBN :
9783319817347
Date de publication :
22 avr. 2018
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This book concentrates on the design and development of integrated optic waveguide sensors using silicon based materials. It gives the readers the full background in the field of sensors, reasons for using silicon oxynitride as a potential waveguide material as well as its fabrication processes and possible uses.