Nanofabrication: principles, capabilities and limits
Auteur :
Cui, Zheng
Éditeur :
Springer International Publishing AG
ISBN :
9783319818757
Date de publication :
20 juin 2018
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale.