Outlook and challenges of nano devices, sensors, and mems
Éditeur :
Springer International Publishing AG
ISBN :
9783319845005
Date de publication :
13 juil. 2018
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things.