Growth of high permittivity dielectrics by high pressure sputtering from metallic targets
Auteur :
Pampillón Arce, MarÃa Ãngela
Éditeur :
Springer International Publishing AG
ISBN :
9783319882840
Date de publication :
18 mai 2018
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Suisse
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.