Handbook of advanced plasma processing techniques
Éditeur :
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN :
9783540667728
Date de publication :
28 août 2000
Dimensions :
23,5 x 15,5 x 3,7 cm
Poids :
1280 g
Langue :
Anglais
Pays d'origine :
Allemagne
The ability to make small features in Si, metals, dielectrics and other materials has enabled rapid advances in computing and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. This work looks at plasma techniques, which enable the fine control and accurate pattern transfer.