Gate dielectrics and mos ulsis: principles, technologies and applications
Auteur :
Hori, Takashi
Éditeur :
Hori, Takashi
ISBN :
9783642645877
Date de publication :
19 sept. 2011
Dimensions :
23,4 x 15,6 x 1,9 cm
Poids :
562 g
Format :
Trade paperback (US)
Langue :
Anglais
Pays d'origine :
Allemagne
Gate Dielectrics focusses on dielectric films satisfying the superior quality gate dielectric even in large-scale integration. The information presented is rather up to date with regard to nanometer-range ultrathin gate-dielectric films, which are indispensible for submicrometer ULSIs.