Micro/nano integrated fabrication technology and its applications in microenergy harvesting
Auteur :
Zhang, Xiao-Sheng
Éditeur :
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN :
9783662569573
Date de publication :
27 mars 2019
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Allemagne
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials.