Planar processing primer
Auteur :
Anner, G.
Éditeur :
Springer
ISBN :
9789401066822
Date de publication :
28 oct. 2011
Dimensions :
22,9 x 15,2 cm
Langue :
Anglais
Pays d'origine :
Nederlands
Planar Processing Primer is based on lecture notes for a silicon planar process ing lecture/lab course offered at the University of Illinois-UC for over fifteen years. The text describes and explains, at an introductory level, the principal processing steps used to convert raw silicon into a semiconductor device or integrated circuit.