Laser heat-mode lithography: principle and methods
Auteur :
Wei, Jingsong
Éditeur :
Springer Verlag, Singapore
ISBN :
9789811509452
Date de publication :
29 nov. 2020
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Singapour
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.