Micro-nano manufacturing and micro-electro-mechanical systems
Auteur :
Li, Jingmin / Liu, Chong / Wang, Liding
Éditeur :
Springer Verlag, Singapore
ISBN :
9789819547579
Date de publication :
24 avr. 2026
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
Singapour
This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS).